Tuning of PHOtonic resonators

Silicon photonics has progressed enormously over the last 15 years: large microelectronics manufacturers and small companies are now working on the subject, with identified products. The reproducibility of micro and nanophotonic devices remains a central technological barrier, to be broken. The dimension errors of cleanroom devices are 1 to 10 nanometers (1%), limiting applications. We have discovered a technique that makes it possible to absorb these errors at the end of manufacturing, permanently. We can tune photonic resonators with an accuracy of 10^(-4), and make them strictly identical when necessary. In this POC project, the patented technique will be transposed on silicon devices of interest, in a simple configuration for manufacturers.